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Varian Semiconductor 109175001 Rotary Slit Assembly Manufacturer Refurbished img{max-width:100%} Ebara ET600W Turbomolecular PumpVarian Semiconductor 109175001 Rotary Slit Assembly Manufacturer Refurbished Part No: 109175001 Rev. E Made in the USA This is refurbished surplus. The physical condition is good, but there may be signs of previous use and handling. Sale Details Item Condition: Refurbished, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 16"x16"x16" @ 30 lbs. Shipping Terms: All Domestic and International shipping quotes and or fees are subject to