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ISBN13: 9780738715629 ISBN10: 073871562X Material Type: paperback
Microsensors: Principles and Applications Children's Weather Books (Books) home-cooked treatsThe main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensorsthe processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array