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This MRC Plenum Chuck is used working surplus
E101394M000
Model No: COMM BOARD
Inventory # CONL-92
TEL Tokyo Electron Part No: CT012-012055
TEL Tokyo Electron 5087-404285-11 ARM-L SCAN (Z) Assembly EBR Lithius Working This MRC Plenum Chuck isTEL Tokyo Electron 5087 404285 11 ARM L SCAN (Z) Assembly EBR Lithius Working Part No: 5087 404285 11 Model No: SCAN (Z) ASSY,EBR ARM L Removed from a TEL Tokyo Electron Clean Track Lithius System Parts List (approximation, some parts may vary) Assembly Part No: 5087 404285 11 SCAN (Z) ASSY,EBR 5010 401944 12 BASE 1 5010 305119 11 PLATE,UNDER 1 5010 303327 11 PLATE,UPPER 1 5018 000024 11 #FLANGE,KR15 1 5010 310138 11 ARM(30),EBR 1 5010 407877 11
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