Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 4S019-137-B

Part No: 4S019-137-B

Part No: 0100-01676

May Require Calibration This Tylan General FC-2901MEP Mass Flow Controller MFC is used working surplus

Part No: 879-8258-001

Removed from a KLA-Tencor eS31 E-Beam Wafer Inspection System This KLA-Tencor 0125812-000 Motor Amp Box Module is used working surplus

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 4S019-137-BTrikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM